EDM mechanism of single crystal SiC with respect to thermal, mechanical and chemical aspects
EDM mechanism of single crystal SiC with respect to thermal, mechanical and chemical aspects
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DOI：
10.1016/j.jmatprotec.2016.05.010
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发表时间：
2016-10
影响因子：
6.3
通讯作者：
Yonghua Zhao;M. Kunieda;K. Abe
中科院分区：
文献类型：
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作者：
Yonghua Zhao;M. Kunieda;K. Abe
在这项研究中，电火花加工（EDM），非接触式热加工工艺，提出了加工单晶碳化硅（SiC），具有极高的机械硬度。然而，作为半导体，SiC与金属材料相比表现出显著不同的EDM特性。本研究透过实验与分析的方法，从热、力与化学三个方面，阐明碳化硅材料的电火花加工特性。考虑焦耳热效应的SiC单次放电的传热分析表明，焦耳热效应可以显著提高放电点附近SiC的表面温度。另一方面，对SiC电火花加工的实验研究发现，由于热冲击，SiC电火花加工中发生沿沿着晶向的脆性断裂。而SiC晶体各向异性对电火花加工特性的影响并不显著。最后，从化学角度探讨了SiC的电火花加工机理。在去离子水中的SiC电火花加工中证实了氧化反应。这些因素都在一定程度上提高了SiC的加工率。
In this study, electrical discharge machining (EDM), a non-contact thermal machining process, is proposed for machining single crystal silicon carbide (SiC) which exhibits extreme mechanical hardness. However, as a semiconductor, SiC demonstrates significantly different EDM characteristics compared with those of metallic materials. This research clarifies the EDM characteristics of SiC from thermal, mechanical and chemical aspects through experimental and analytical approaches. The heat transfer analysis of a single discharge of SiC taking into account Joule heating effect revealed that Joule heating effect can increase the surface temperature of SiC near the discharge spot considerably. On the other hand, experimental investigations on the EDM of SiC found that brittle fractures along crystal orientations occur in the EDM of SiC due to thermal shock. However, the influence of the crystal anisotropy of SiC on the EDM characteristics was not significant. Finally, the EDM mechanism of SiC was investigated from chemical aspects. Oxidation reaction was confirmed in the EDM of SiC in deionized water. All of these factors helped improve the machining rate of SiC to a certain extent.