Design of a Dual Quantization Electromechanical Sigma-Delta Modulator MEMS Vibratory Wheel Gyroscope
Design of a Dual Quantization Electromechanical Sigma-Delta Modulator MEMS Vibratory Wheel Gyroscope
复制标题
双量化机电Sigma-Delta调制器MEMS振动轮陀螺仪的设计
DOI：
10.1109/jmems.2017.2787982
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发表时间：
2018-04-01
影响因子：
2.7
通讯作者：
Li, Xinxin
中科院分区：
文献类型：
--
作者：
Sheng, Bin;Chen, Fang;Li, Xinxin
提出了一种模式匹配条件下的双量化横轴容性机电Σ-Δ调制器（EM-EAM）振动轮陀螺。设计、制作了一种对称轮式陀螺结构，并进行了真空圆片级封装。EM-Sigma Delta M接口环路采用四阶多反馈和本地谐振器Sigma Delta M噪声整形结构，利用单环路调制器中的单比特和多比特量化。为了评估量化噪声的影响，比较了多比特量化器的不同比特数，并计算了最佳比特数。该接口电路系统是基于低噪声前端专用集成电路和后端离散时间EM-Σ-Δ M在现场可编程门阵列芯片实现的硬件实现。系统时钟是使用自时钟方案生成的，该方案允许与具有宽范围驱动频率的陀螺仪接口。实验结果表明，该数字陀螺系统的标度因子为2073 LSB（4.1mV）/deg/s，非线性度为0.046%，在100 Hz带宽内的本底噪声为3.1m/s/，/Hz，偏置不稳定度为1.3deg/hr。
This paper presents a dual quantization lateral-axis capacitive electromechanical sigma delta modulator (EM-E AM) vibratory wheel gyroscope under mode-matched condition. A symmetric wheel gyroscope structure was designed, fabricated, and wafer-level packaged under vacuum. The EM-Sigma Delta M interface loop adopts a fourth-order multifeedback and local resonator Sigma Delta M noise shaping structure, taking advantage of single-bit and multibit quantization in a single-loop modulator. To evaluate the influence of quantization noise, various numbers of bits of the multibit quantizator were compared and the optimal number of bits was calculated. The interface circuit system was implemented in hardware based on a low-noise front-end application-specified integrated circuit and a hack end discrete-time EM-Sigma Delta M realized in a field-programmable gate array chip. The system clock was generated using a self clocking scheme, which allows interfacing to gyroscope with a wide range of drive frequencies. Experimental evaluation indicated that the digital gyroscope system achieved a scale factor of 2073LSB(4.1 mV)/deg/s, with a nonlinearity of 0.046%, a noise floor of 3.1 m /s/,/Hz within a bandwidth of 100 Hz, and a bias instability of 1.3 deg/hr.