On-Chip Narrowband Thermal Emitter for Mid-IR Optical Gas Sensing
On-Chip Narrowband Thermal Emitter for Mid-IR Optical Gas Sensing
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DOI：
10.1021/acsphotonics.6b01025
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发表时间：
2017-06-01
期刊：
影响因子：
7
通讯作者：
Leuthold, Juerg
中科院分区：
文献类型：
--
作者：
Lochbaum, Alexander;Fedoryshyn, Yuriy;Leuthold, Juerg
与互补金属氧化物半导体(CMOS)技术兼容的高效光源是低成本、紧凑型中红外气体传感系统的关键部件。在本工作中，我们将微电子机械系统(MEMS)加热器与超材料完美发射极结构相结合，提出了一种用于中红外波段的片上窄带热光源。其中心波长为3.96im，发射率为0.99，共振品质因数为15.7，是一种光谱窄、效率高的光源。我们表现出温度稳定(共振波长漂移0.04 nm/C)和角度无关的发射特性，高达50个角度，并提供了一个等效电路模型来解释该结构的共振行为。由于其光谱定制的非色散发射，自由空间光学气体传感装置中的附加滤光片元件变得过时。在这种二氧化碳浓度在050000 ppm范围内的无过滤器气体传感系统的概念验证演示中，我们观察到与使用传统的黑体发射器相比，相对灵敏度提高了5倍。我们的光源完全兼容标准的cmos工艺，发射波长可通过中红外波段进行调节。它为新型高集成度、低成本的光学气体传感器铺平了道路。
Efficient light sources compatible to complementary metal oxide semiconductor (CMOS) technology are key components for low-cost, compact mid-infrared gas sensing systems. In this work we present an on-chip narrowband thermal light source for the mid-infrared wavelength range by combining microelectromechanical system (MEMS) heaters with metamaterial perfect emitter structures. Exhibiting a resonance quality factor of 15.7 at the center wavelength of 3.96 im and an emissivity of 0.99, the demonstrated emitter is a spectrally narrow and efficient light source. We show temperature-stable (resonance wavelength shift 0.04 nm/ C) and angular-independent emission characteristics up to angles of 50 and provide an equivalent circuit model illustrating the structure's resonance behavior. Owing to its spectrally tailored, nondispersive emission, additional filter elements in a free-space optical gas sensing setup become obsolete. In a proof-of-concept demonstration of such a filter-free gas sensing system with CO2 concentrations in the range of 050000 ppm, we observe a 5-fold increase in relative sensitivity compared to the use of a conventional blackbody emitter. Our light source is fully compatible with standard CMOS processes and tunable in emission wavelength through the mid-infrared wavelength band. It paves the way for a new class of highly integrated, low-cost optical gas sensors.