Scanning force microscopic investigations of the femtosecond laser pulse irradiation of indium phosphide in air
Scanning force microscopic investigations of the femtosecond laser pulse irradiation of indium phosphide in air
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DOI：
10.1109/tnano.2004.828574
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发表时间：
2004-09
影响因子：
2.4
通讯作者：
J. Bonse;Martin Munz;H. Sturm
中科院分区：
文献类型：
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作者：
J. Bonse;Martin Munz;H. Sturm
单晶磷化铟 (InP) 的激光烧蚀是在空气中通过线性偏振钛蓝宝石飞秒脉冲（800 nm、130 fs、10 Hz）进行的。由于每个点使用可变数量的激光脉冲（N/spl les/5）进行照射，观察到了几种形态变化（弹坑形成、边缘形成、波纹结构和锥体）。使用力调制显微镜 (FMM) 探索了这些效应，这是一种基于扫描力显微镜的技术，允许以高横向分辨率同时对形貌和局部刚度进行成像。第一个激光脉冲诱导形成与烧蚀坑接壤的突出边缘（高度 < 20 nm，宽度 /spl ap/ 300 nm）。对多脉冲生成的形貌进行傅里叶分析揭示了波长大小的周期性波纹（调制深度< 100 nm）的形成，其方向垂直于激光辐射的电场矢量的方向。除了这些形态变化之外，通过 FMM 技术还可以在辐照区域观察到材料变化。在烧蚀坑内，发现局部刚度变化，揭示了飞秒脉冲激光处理导致的不均匀材料成分/结构。
Laser ablation of single-crystalline indium phosphide (InP) was performed in air by means of linearly polarized Ti : sapphire femtosecond pulses (800 nm, 130 fs, 10 Hz). As a result of the irradiation with a variable number of laser pulses per spot (N /spl les/ 5), several morphological changes (crater formation, rim formation, ripple structures, and cones) were observed. These effects were explored using force modulation microscopy (FMM), a technique based on scanning force microscopy, allowing the simultaneous imaging of both topography and local stiffness at a high lateral resolution. The first laser pulse induces the formation of a protruding rim (height < 20 nm, width /spl ap/ 300 nm) bordering the ablated crater. A Fourier analysis of the multipulse generated topographies reveals the formation of wavelength-sized periodic ripples (modulation depth < 100 nm) with an orientation perpendicular to that of the electric field vector of the laser radiation. Besides these morphological alterations, material modifications were also observed in the irradiated regions by means of the FMM technique. Within the ablated craters, local stiffness variations were found revealing an inhomogeneous material composition/structure as a consequence of the femtosecond pulse laser treatment.