Surface modification of Al2O3 ceramic grains using a new RF sputtering system developed for powdery materials
Surface modification of Al2O3 ceramic grains using a new RF sputtering system developed for powdery materials
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DOI：
10.1016/j.jallcom.2003.12.053
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发表时间：
2004-09
影响因子：
6.2
通讯作者：
T. Abe;S. Akamaru;Kuniaki Watanabe
中科院分区：
文献类型：
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作者：
T. Abe;S. Akamaru;Kuniaki Watanabe
研制了一种新型射频溅射系统，用于粉末材料表面的修饰。对三种不同晶粒形状和尺寸的al2o3粉体进行了表面涂层试验，验证了该系统的有效性。结果表明，无论粉末颗粒的形状和大小如何，其表面都可以均匀地涂覆铂层。值得注意的是，在直径为20μm的al2o3晶粒上，六角形料筒可以形成均匀的Pt层，而圆柱形料筒则不能形成均匀的Pt层。用六方桶法制备的包覆Pt的al2o3样品的循环伏安图（CV）显示出大块Pt的CV相同，表明Pt膜的电化学特性与金属Pt膜的电化学特性相同。
A new RF sputtering system installed with a hexagonal-barrel was developed for modifying the surfaces of powdery materials. The validity of this system was examined for surface coating of three kinds of Al2O3powders with different grain shapes and sizes. It was found that the surfaces of powder grains could be uniformly coated with Pt layers, regardless of their shapes and sizes. It should be noticed that the hexagonal barrel made it possible to form a uniform Pt layer over a Al2O3grain of 20μm diameter, whereas a cylindrical barrel failed to made a uniform layer on the same sample. Cyclic voltammograms (CVs) of the Pt-coated Al2O3samples prepared by use of the hexagonal barrel gave the same CV of bulky Pt, indicating that electrochemical characteristics of the Pt films are identical with those of Pt metal.