Translation stage for a scanning x‐ray optical interferometer
Translation stage for a scanning x‐ray optical interferometer
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扫描 X 射线光学干涉仪的平移台
DOI：
10.1063/1.1139308
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发表时间：
1987
影响因子：
1.6
通讯作者：
H. Siegert
中科院分区：
文献类型：
--
作者：
P. Becker;P. Seyfried;H. Siegert
所描述的平移台允许在 20 N 的负载下实现高达 200 μm 的直线位移。直线运动的横向偏差不超过几纳米。倾斜度减少到几个纳弧度。通过压电驱动器，可以实现振动幅度低于 0.1 nm 的缓慢连续运动。通过远程控制的磁补偿元件，可将由于加工公差和驱动器非理想耦合而导致的残余倾斜误差降低至 nrad 水平。
A translation stage is described which allows rectilinear displacements of up to 200 μm with a load of 20 N. Lateral deviations from the rectilinear movement do not exceed a few nanometers. Tilts are reduced to a few nanoradians. By means of a piezoelectric drive, slow continuous motion with vibration amplitudes below 0.1 nm is achieved. Residual tilting errors due to machining tolerances and nonideal coupling of the drive are reduced to nrad levels by magnetic compensation elements which are remote controlled.