Calibration of higher eigenmode spring constants of atomic force microscope cantilevers

Calibration of higher eigenmode spring constants of atomic force microscope cantilevers
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DOI:
10.1088/0957-4484/21/46/465502
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发表时间:
2010-11-19
期刊:
影响因子:
3.5
通讯作者:
Raman, Arvind
Raman, Arvind
中科院分区:
材料科学3区
文献类型:
--
作者:
Lozano, Jose R.;Kiracofe, Daniel;Raman, Arvind

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对动态原子力显微镜(dAFM)中悬臂梁高特征模态的标准弹簧常数校准方法进行了比较。分析表明Sader的原始方法(Sader et al . 1999 Rev. Sci.)。仪器。70 3967-9),它依赖于本征模态形状的先验知识,是不适合校准较高的本征模态。另一方面,热噪声法(Hutter and Bechhoefer 1993 Rev. Sci。仪器。64(1868-73)不需要本征模的知识,并且对于dAFM探针的高本征模仍然有效。对三个典型悬臂梁在空气中的热振动进行了实验测量,以支持理论结果。
Standard spring constant calibration methods are compared when applied to higher eigenmodes of cantilevers used in dynamic atomic force microscopy (dAFM). Analysis shows that Sader's original method (Sader et al 1999 Rev. Sci. Instrum. 70 3967-9), which relies on a priori knowledge of the eigenmode shape, is poorly suited for the calibration of higher eigenmodes. On the other hand, the thermal noise method (Hutter and Bechhoefer 1993 Rev. Sci. Instrum. 64 1868-73) does not require knowledge of the eigenmode and remains valid for higher eigenmodes of the dAFM probe. Experimental measurements of thermal vibrations in air for three representative cantilevers are provided to support the theoretical results.