Crystallization of BaTiO3 Thin Film at 140°C by Metalorganic Decomposition Hydrothermal Method Using Different Precursors
Crystallization of BaTiO3 Thin Film at 140°C by Metalorganic Decomposition Hydrothermal Method Using Different Precursors
复制标题
不同前驱体金属有机分解水热法在 140°C 结晶 BaTiO3 薄膜
DOI：
10.1143/jjap.41.6619
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发表时间：
2002
影响因子：
1.5
通讯作者：
M. Okuyama
中科院分区：
文献类型：
--
作者：
Zhiqiang Wei;M. Noda;M. Okuyama
在Ba（OH）2水溶液中，采用水热法在140°C下成功地晶化了金属有机物分解的TiO2、BaTiO3和SrTiO3凝胶薄膜。TiO2凝胶膜经水热处理后得到的BaTiO3薄膜具有（100）择优取向，而BaTiO3和SrTiO3凝胶膜经水热处理后得到的BaTiO3薄膜具有（110）择优取向。电感耦合等离子体光谱分析表明，TiO2凝胶膜经水热处理后得到的BaTiO3薄膜中，即使经过300 min的水热处理后，薄膜中仍然富含Ti，而BaTiO3和SrTiO3凝胶膜得到的BaTiO3薄膜几乎是化学计量比的。BaTiO_3凝胶膜经水热处理后得到的BaTiO_3薄膜表现出铁电滞回特性，而TiO_2凝胶膜则表现出顺电性。
BaTiO3 thin films have been successfully crystallized by hydrothermal treatment of metalorganic decomposition-derived TiO2, BaTiO3 and SrTiO3 gel films in Ba(OH)2 aqueous solution at a low temperature of 140°C. BaTiO3 thin film obtained by hydrothermal treatment of TiO2 gel film shows (100) preferred orientation, whereas BaTiO3 thin films obtained by hydrothermal treatment of BaTiO3 and SrTiO3 gel films show (110) preferred orientation. Inductively coupled plasma spectroscopy shows that in BaTiO3 thin film obtained by hydrothermal treatment of TiO2 gel film, Ti is still rich in the films even after 300 min treatment, but the BaTiO3 thin films obtained from BaTiO3 and SrTiO3 gel film are almost stoichiometric. The BaTiO3 thin film obtained by hydrothermal treatment of BaTiO3 gel film shows ferroelectric hysteresis, while that obtained from TiO2 gel film shows paraelectricity.