Fabrication of complex periodic micro/nanopatterns by multiple interfered femtosecond laser pulses on thin solid films
Fabrication of complex periodic micro/nanopatterns by multiple interfered femtosecond laser pulses on thin solid films
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DOI：
10.1049/mnl.2010.0232
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发表时间：
2011-02
影响因子：
1.3
通讯作者：
Xia Li;D. Feng;T. Jia;Zhenrong Sun;Zhi‐zhan Xu
中科院分区：
文献类型：
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作者：
Xia Li;D. Feng;T. Jia;Zhenrong Sun;Zhi‐zhan Xu
利用三束或两束干涉的800 nm飞秒激光在醋酸锌薄膜上制备了复杂周期性微纳结构。三束激光干涉产生2D周期性微花结构，花瓣尺寸小至100 nm，远小于激光波长及其衍射极限尺度。而两束飞秒激光相互干涉则在两个正交方向上分别产生长周期为3.0 m和短周期为150 nm的二维阵列状光栅图案。理论计算表明，花状/光栅状图案的长周期性是由干涉强度分布决定的，而微花状图案的花瓣结构或光栅状图案的短周期性则由干涉偏振分布决定。
Complex periodic micro/nanopatterns have been fabricated on zinc acetate thin films by the irradiation of three or two interfered 800 nm femtosecond laser beams. Three interfered laser beams produce 2D periodic microflower structures with petal sizes as small as 100 nm, which is much smaller than the laser wavelength and its diffraction-limited scale. While two interfered femtosecond laser beams lead to 2D arrayed grating-like patterns with a long period of 3.0 m and a short period of 150 nm in two orthogonal directions, respectively. Theoretical calculation indicated that the long periodicities of flower/grating-like patterns were attributed to the interferential intensity distribution, whereas petal structures of microflowers or short periodicities of grating-like patterns were determined by the interferential polarisation distribution.