Ultraviolet, Optical, and Near-IR Microwave Kinetic Inductance Detector Materials Developments
Ultraviolet, Optical, and Near-IR Microwave Kinetic Inductance Detector Materials Developments
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紫外、光学和近红外微波动感电感探测器材料的开发
DOI：
10.1109/tasc.2014.2377598
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发表时间：
2014
影响因子：
1.8
通讯作者：
L. Baker
中科院分区：
文献类型：
--
作者：
P. Szypryt;B. Mazin;B. Bumble;H. Leduc;L. Baker
我们在紫外/光学/近红外（UVOIR）体制下制作了2024像素微波动力学电感探测器（MKID）阵列，目前用于天文仪器。为了使mkid成为新型仪器的理想选择，需要制造具有近乎完美产量的更大阵列。然而，随着阵列大小的增加，由于读出中的频率冲突，产率百分比通常会降低。每像素的性能也必须提高，即能量分辨率。我们正在研究通过新的超导材料系统和制造技术来减少频率碰撞和提高我们设备的每像素性能的方法。我们目前正在探索两条主要路线。首先，我们正在尝试通过原子层沉积而不是传统的溅射方法来制造更均匀的氮化钛薄膜。此外，我们正在试验全新的MKIDs材料系统，如硅化铂。
We have fabricated 2024 pixel microwave kinetic inductance detector (MKID) arrays in the ultraviolet/optical/ near-IR (UVOIR) regime that are currently in use in astronomical instruments. In order to make MKIDs desirable for novel instruments, larger arrays with nearly perfect yield need to be fabricated. As array size increases, however, the percent yield often decreases due to frequency collisions in the readout. The per-pixel performance must also be improved, namely, the energy resolution. We are investigating ways to reduce frequency collisions and to improve the per-pixel performance of our devices through new superconducting material systems and fabrication techniques. There are two main routes that we are currently exploring. First, we are attempting to create more uniform titanium nitride films through the use of atomic layer deposition rather than the more traditional sputtering method. In addition, we are experimenting with completely new material systems for MKIDs, such as platinum silicide.