High-speed MEMS-OSA and its application to fiber sensors
High-speed MEMS-OSA and its application to fiber sensors
复制标题
高速MEMS-OSA及其在光纤传感器中的应用
DOI：
10.1117/12.566512
复制
发表时间：
2004
期刊：
影响因子：
--
通讯作者：
Yoshifumi Takahashi
中科院分区：
文献类型：
--
作者：
Yoshifumi Takahashi
我们利用微机电系统 (MEMS) 技术开发了微型高速光谱分析仪 (OSA)。它由发动机、驱动电路、A/D转换器和PC机组成。它的波长精度为 10 pm，扫描速率为 1.3 ms，动态范围为 33 dB。 MEMS-OSA 的核心是 MEMS 扫描镜 (12 x 2 mm)，可连续快速地测量光谱。扫描镜由集成在镜中的电极产生的静电力驱动。驱动电压约为200 V。本文综述了MEMS-OSA的原理、设计、性能以及在光纤布拉格光栅(FBG)畸变传感器中的应用。该 OSA 允许以 1.3 ms 的扫描速率和 ±2 μ Strain 的精度测量施加的失真。它可以测量高达约 100 Hz 的失真，例如地震的速度。
We developed a miniature and high-speed optical spectrum analyzer (OSA) using Micro-Electro-Mechanical Systems (MEMS) technology. It consists of an engine, driving circuit, A/D converter, and PC. It has a wavelength accuracy of 10 pm, scan rate of 1.3 ms, and dynamic range of 33 dB. The heart of the MEMS-OSA is the MEMS scanning mirror (12 x 2 mm) that measures the spectrum continuously and rapidly. The scanning mirror is actuated by electrostatic force derived from electrodes integrated in the mirror. The driving voltage is about 200 V. This paper reviews the principal of the MEMS-OSA, design, performance, and application in a Fiber Bragg Grating (FBG) distortion sensor. This OSA permits measurement of applied distortion with a scan rate of 1.3 ms and an accuracy of ±2 μ Strain. It can measure distortion up to about 100 Hz, like the speed of an earthquake.