Metrology in a scanning electron microscope: theoretical developments and experimental validation
Metrology in a scanning electron microscope: theoretical developments and experimental validation
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DOI：
10.1088/0957-0233/17/10/012
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发表时间：
2006-08
影响因子：
2.4
通讯作者：
M. Sutton;Ning Li;D. Garcia;N. Cornille;J. Orteu;S. Mcneill;H. Schreier;Xiaodong Li
中科院分区：
文献类型：
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作者：
M. Sutton;Ning Li;D. Garcia;N. Cornille;J. Orteu;S. Mcneill;H. Schreier;Xiaodong Li
描述了一种用于校正扫描电子显微镜（SEM）图像中存在的空间和漂移失真的新方法。空间失真去除使用的方法，采用了一系列的平面内刚体运动和生成的翘曲函数。漂移失真去除使用多个，时间间隔的图像，以提取整个实验中随时间变化的相对位移场。数值模拟的结果清楚地表明，校正程序成功地消除了空间和漂移失真。具体而言，在没有强度噪声的情况下，失真去除方法始终给出误差在±0.01像素量级的优异结果。在200×的刚体运动和拉伸加载实验中，经过畸变校正后，位移具有近似随机的变化性，标准偏差为0.02个象素，应变场的测量结果是无偏的，与光学照明的全场实验结果吻合得很好;（c）应变场可变性在所有分量中为60微应变的量级，空间分辨率为25像素的量级。总之，分析，计算和实验研究清楚地表明，校正程序成功地消除了空间和漂移失真，同时保持良好的空间分辨率，证实了基于SEM的方法可用于弹性或弹塑性变形机制中的微观材料和纳米材料表征。
A novel approach for correcting both spatial and drift distortions that are present in scanning electron microscope (SEM) images is described. Spatial distortion removal is performed using a methodology that employs a series of in-plane rigid body motions and a generated warping function. Drift distortion removal is performed using multiple, time-spaced images to extract the time-varying relative displacement field throughout the experiment. Results from numerical simulations clearly demonstrate that the correction procedures successfully remove both spatial and drift distortions. Specifically, in the absence of intensity noise the distortion removal methods consistently give excellent results with errors on the order of ±0.01 pixels. Results from the rigid body motion and tensile loading experiments at 200× indicate that, after correction for distortions, (a) the displacements have nearly random variability with a standard deviation of 0.02 pixels; (b) the measured strain fields are unbiased and in excellent agreement with previous full-field experimental data obtained with optical illumination; (c) the strain field variability is on the order of 60 microstrain in all components with a spatial resolution on the order of 25 pixels. Taken together, the analytical, computational and experimental studies clearly show that the correction procedures successfully remove both spatial and drift distortions while retaining excellent spatial resolution, confirming that the SEM-based method can be used for both micromaterial and nanomaterial characterization in either the elastic or elastic–plastic deformation regimes.