Selective area molecular beam epitaxy of InAs on GaAs (110) masked substrates for direct fabrication of planar nanowire field-effect transistors
Selective area molecular beam epitaxy of InAs on GaAs (110) masked substrates for direct fabrication of planar nanowire field-effect transistors
复制标题
在 GaAs (110) 掩模衬底上选择性区域分子束外延 InAs,用于直接制造平面纳米线场效应晶体管
DOI:
10.1016/j.jcrysgro.2012.02.009
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发表时间:
2012
期刊:
影响因子:
--
通讯作者:
S.Yamada
中科院分区:
文献类型:
--
作者:
M.Akabori;T.Murakami;S.Yamada