Experimental study on thermal characteristics of suspended platinum nanofilm sensors
Experimental study on thermal characteristics of suspended platinum nanofilm sensors
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DOI：
10.1016/j.ijheatmasstransfer.2006.04.016
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发表时间：
2006-10-01
影响因子：
5.2
通讯作者：
Shimizu, Tetsuo
中科院分区：
文献类型：
--
作者：
Zhang, Xing;Xie, Huaqing;Shimizu, Tetsuo
本文对悬浮式铂纳米薄膜传感器的热特性进行了实验研究。采用电子束光刻、电子束物理气相沉积和各向同性/各向异性刻蚀工艺制备了厚度为28-40 nm、宽度为260-601 nm、长度为5.3-5.7 μ m的Pt纳米薄膜传感器。基于一维热传导模型，由真空中测量的体积平均温升与加热速率的线性关系，得到了纳米薄膜传感器的面内热导率。此外，还研究了在1 × 10（-2）Pa至1 atm的压力范围内悬浮纳米膜传感器周围的空气的自然对流传热系数。实验结果表明，纳米薄膜传感器的面内导热系数远低于体材料的面内导热系数，但在大气压下自然对流换热系数很高。(c)2006爱思唯尔有限公司版权所有。
In this paper, the thermal characteristics of suspended platinum (Pt) nanofilm sensors have been investigated experimentally. The Pt nanofilm sensors with the thickness of 28-40 nm, the width of 260-601 nm, and the length of 5.3-5.7 mu m were fabricated by electron beam lithography, electron beam physical vapor deposition and isotropic/anisotropic etching processes. Based on the one-dimensional heat conduction model, the in-plane thermal conductivity of the nanofilm sensors was obtained from the linear relation of the volume-averaged temperature increase and the heating rate measured in vacuum. Furthermore, natural convection heat transfer coefficients of air around the suspended nanofilm sensors at the pressures ranging from 1 x 10(-2) Pa to 1 atm were also investigated. The experimental results show that the in-plane thermal conductivities of the nanofilm sensors are much lower than those of the bulk values, the natural convection heat transfer coefficients are, however, very high at the atmospheric pressure. (c) 2006 Elsevier Ltd. All rights reserved.