Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators.
Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators.
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DOI：
10.1038/srep19426
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发表时间：
2016-01-21
影响因子：
4.6
通讯作者：
Ayela C
中科院分区：
文献类型：
--
作者：
Ducrot PH;Dufour I;Ayela C
本文对有机MEMS谐振器中集成换能器用PVDF-TrFE压电薄膜的工艺条件进行了系统优化。事实上，尽管在文献中发现了PVDF的机电性能数据，但导致这些性能的优化加工条件仍然只是部分描述。在这项工作中，通过评估MEMS谐振器的驱动性能，对参数进行了严格的优化，使PVDF-TrFE薄膜具有最先进的压电性能。对退火时间、极化场和极化时间等条件进行了优化，并证明了该工艺的可重复性。
This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to these properties remain only partially described. In this work, a rigorous optimization of parameters enabling state-of-the-art piezoelectric properties of PVDF-TrFE thin films has been performed via the evaluation of the actuation performance of MEMS resonators. Conditions such as annealing duration, poling field and poling duration have been optimized and repeatability of the process has been demonstrated.