Poly(dimethylsiloxane)-based packaging technique for microchip fluorescence detection system applications
Poly(dimethylsiloxane)-based packaging technique for microchip fluorescence detection system applications
复制标题
DOI：
10.1109/jmems.2006.880355
复制
发表时间：
2006-10-01
影响因子：
2.7
通讯作者：
Ju, Byeong-Kwon
中科院分区：
文献类型：
--
作者：
Kim, Young-Hwan;Shin, Kyeong-Sik;Ju, Byeong-Kwon
提出了包括封装在内的简化集成过程，从而实现了便携式荧光检测系统。研制了一种由集成p-i-n光电二极管、作为光源的有机发光二极管、干涉滤光片和微通道组成的荧光检测微芯片系统。采用基于聚二甲基硅氧烷（PDMS）的封装制造的片上荧光检测器具有薄膜结构。硅基集成 p-i-n 光电二极管与光学滤波器相结合，消除了同一基板上由激发源产生的背景噪声。扩大了指型p-i-n光电二极管的有效面积，以获得更高的荧光检测灵敏度。系统的灵敏度和检测限（LOD；S/N = 3）分别为0.198 nA/μM和10μM。
A simplified integration process including packaging is presented, which enables the realization of the portable fluorescence detection system. A fluorescence detection microchip system consisting of an integrated p-i-n photodiode, an organic light-emitting diode as the light source, an interference filter, and a microchannel was developed. The on-chip fluorescence detector fabricated by poly(dimethylsiloxane) (PDMS)-based packaging had a thin-film structure. A silicon-based integrated p-i-n photodiode combined with an optical filter removed the background noise, which was produced by an excitation source, on the same substrate. The active area of the finger-type p-i-n photodiode was extended to obtain a higher detection sensitivity of fluorescence. The sensitivity and the limit of detection (LOD; S/N = 3) of the system were 0.198 nA/mu M and 10 mu M, respectively.