Magnetic detection of photogenerated currents in semiconductor wafers using superconducting quantum interference devices
Magnetic detection of photogenerated currents in semiconductor wafers using superconducting quantum interference devices
复制标题
使用超导量子干涉装置对半导体晶圆中的光生电流进行磁检测
DOI：
10.1063/1.124039
复制
发表时间：
1999
影响因子：
4
通讯作者：
T. Schurig
中科院分区：
文献类型：
--
作者：
J. Beyer;H. Matz;D. Drung;T. Schurig
提出了一种利用超导量子干涉仪（SQUID）磁强计系统对半导体晶片进行高空间分辨率研究的完全非侵入性方法。该方法是基于使用一个敏感的SQUID磁强计的半导体样品中产生的光电流所造成的磁场的检测。当具有超过半导体带隙的光子能量的激光聚焦到掺杂梯度区域中的样品表面上时，光电流产生。这种探测方法的空间分辨率主要由20 μm左右的激发焦点大小决定。我们报告硅晶片的测量与生长相关的掺杂波动小。
A completely noninvasive method is presented for the investigation of semiconductor wafers with high spatial resolution utilizing a superconducting quantum interference device (SQUID) magnetometer system. The method is based on the detection of the magnetic field caused by photocurrents generated in the semiconductor sample using a sensitive SQUID magnetometer. The photocurrents arise when laser light with a photon energy exceeding the band gap of the semiconductor is focused onto the sample surface in a region of a doping gradient. The spatial resolution of this detection method is mainly determined by the size of the excitation focus of about 20 μm. We report on measurements of silicon wafers with small growth-related doping fluctuations.