Integration technologies for silicon carbide-based ceramics for micro-electro-mechanical systems‐lean direct injector fuel injector applications
Integration technologies for silicon carbide-based ceramics for micro-electro-mechanical systems‐lean direct injector fuel injector applications
复制标题
用于微机电系统的碳化硅基陶瓷集成技术——精益直喷式燃油喷射器应用
DOI：
10.1111/j.1744-7402.2012.02766.x
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发表时间：
2012
影响因子：
2.1
通讯作者：
M. Singh and H. Tsuda
中科院分区：
文献类型：
--
作者：
M. C. Halbig;M. Singh and H. Tsuda
先进的连接方法是制造和集成碳化硅基微机电系统贫直接燃料喷射器的喷气发动机的迫切需要。碳化硅与钛中间层的扩散结合提供了诸如均匀的应用/表面覆盖以及在接合处理期间中间层或反应形成的相不流动的优点。所得接头均匀、稳定、无泄漏且具有高强度。用物理气相沉积（PVD）法和纯金属箔法制备了厚度为10和20 μm的钛中间层。研究了中间层类型、厚度和处理时间对所得微观结构的影响。采用电子探针分析和扫描电子显微镜结合能量色散谱、超声浸没无损评价方法和透射电子显微镜对接头及其反应形成的相进行分析。对于物理气相沉积Ti中间层，10 μm涂层的结果最好，接头没有中间相或微裂纹。对于Ti箔中间层，与保持1和2 h的接头相比，保持4 h的接头具有更稳定的相和更少的微裂纹。扩散连接的平均拉伸强度为14.2MPa，比应用要求高2-3倍。扩散连接方法被证明满足SiC基燃料喷射器制造的要求。
Advanced joining approaches are critically needed for the fabrication and integration of silicon carbide‐based micro‐electro‐mechanical systems lean direct fuel injectors for jet engines. Diffusion bonding of silicon carbide with titanium interlayers offers advantages such as uniform application/surface coverage and no flow of the interlayer or the reaction formed phases during joint processing. The resulting joints were uniform, stable, leak free, and had high strength. Titanium interlayers with 10 and 20 μm thicknesses were obtained from physical vapor deposition (PVD) and pure metallic foils. The effects of the interlayer type and thickness and processing time on the resultant microstructures were investigated. The joints and their reaction‐formed phases were analyzed with electron microprobe analysis and scanning electron microscopy coupled with energy‐dispersive spectroscopy, ultrasonic immersion nondestructive evaluation method, and transmission electron microscopy. For the physical vapor deposition Ti interlayers, the 10 μm coating gave the best results yielding a joint that did not have intermediate phases or microcracking. For the Ti foil interlayers, the joint processed with a 4 h‐hold time had more stable phases and less microcracking than those with 1 and 2 h‐hold times. The average tensile strength of the diffusion bonds was 14.2 MPa which was 2–3 times higher than the application requirements. The diffusion bonding approach was shown to meet the requirements for SiC‐based fuel injector fabrication.