Plasma-enhanced CVD-derived amorphous carbon membranes and their permeation characteristics

Plasma-enhanced CVD-derived amorphous carbon membranes and their permeation characteristics
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等离子体增强CVD衍生的非晶碳膜及其渗透特性

DOI:
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发表时间:
2015
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影响因子:
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通讯作者:
Tishinori Tsuru
Tishinori Tsuru
中科院分区:
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文献类型:
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作者:
Hiroki Nagasawa;Masakoto Kanezashi;Tomohisa Yoshioka;Tishinori Tsuru

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