Role of Kinetic Factors in Chemical Vapor Deposition Synthesis of Uniform Large Area Graphene Using Copper Catalyst
Role of Kinetic Factors in Chemical Vapor Deposition Synthesis of Uniform Large Area Graphene Using Copper Catalyst
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DOI：
10.1021/nl102355e
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发表时间：
2010-10-01
期刊：
影响因子：
10.8
通讯作者：
Kong, Jing
中科院分区：
文献类型：
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作者：
Bhaviripudi, Sreekar;Jia, Xiaoting;Kong, Jing
在这篇文章中，动力学的作用，特别是在使用低碳固溶催化剂（Cu）的石墨烯的化学气相沉积（CVD）合成中反应室的压力，对大面积厚度均匀性和缺陷密度的作用被呈现。虽然合成系统的热力学保持不变，但是基于该过程是否在大气压（AP）下进行，低压（LP）（01 - 1 Torr）或在超真空（UHV）条件下，生长现象的动力学是不同的，导致在大面积上所得石墨烯生长的均匀性的变化讨论了APCVD和LPCVD的动力学模型，从而为理解APCVD与LPCVD/UHVCVD石墨烯合成之间的差异提供见解有趣的是，在较高甲烷浓度下在APCVD工艺中使用Cu催化剂的石墨烯合成揭示了生长不是自限性的，这与先前对LPCVD情况的观察相反。另外，在APCVD生长的石墨烯上还观察到宽度范围为20至100 nm的纳米带和纳米条。观察到石墨烯纳米特征（边缘、折叠）与来自Cu蚀刻剂的污染物金属纳米颗粒之间的相互作用，表明这些样品可以潜在地用于研究单分子的化学反应性。DNA和具有单层石墨烯的纳米颗粒
In this article, the role of kinetics, in particular, the pressure of the reaction chamber in the chemical vapor deposition (CVD) synthesis of graphene using low carbon solid solubility catalysts (Cu), on both the large area thickness uniformity and the defect density are presented Although the thermodynamics of the synthesis system remains the same, based on whether the process is performed at atmospheric pressure (AP), low pressure (LP) (0 1 -1 Torr) or under ultrahigh vacuum (UHV) conditions, the kinetics of the growth phenomenon are different, leading to a variation in the uniformity of the resulting graphene growth over large areas (wafer scale) The kinetic models for APCVD and LPCVD are discussed, thereby providing insight for understanding the differences between APCVD vs LPCVD/UHVCVD graphene syntheses Interestingly, graphene syntheses using a Cu catalyst in APCVD processes at higher methane concentrations revealed that the growth is not self-limiting, which is in contrast to previous observations for the LPCVD case Additionally, nanoribbons and nanostrips with widths ranging from 20 to 1 00 nm were also observed on the APCVD grown graphene Interactions between graphene nanofeatures (edges, folds) and the contaminant metal nanoparticles from the Cu etchant were observed, suggesting that these samples could potentially be employed to Investigate the chemical reactivity of single molecules. DNA, and nanoparucles with monolayer graphene