Thermally actuated probe arrays for manipulation and characterization of individual bio-cell
Thermally actuated probe arrays for manipulation and characterization of individual bio-cell
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用于单个生物细胞的操作和表征的热驱动探针阵列
DOI：
10.1109/sensor.2003.1217000
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
L. Buchaillot
中科院分区：
文献类型：
--
作者：
Beomjoon Kim;D. Collard;M. Lagouge;F. Conseil;B. Legrand;L. Buchaillot
我们提出了一种新的概念，热微致动器结合电传感器设备来捕获和表征单个活生物细胞。在我们的微加工器件中，集成了传感部分（表面微加工多晶硅）和驱动使用多晶硅和透明厚聚合物（SU-8）之间的热膨胀系数的差异，杠杆从基板上的流动通道构建。本文讨论了我们的双压电晶片探针阵列的详细制作，器件的驱动和模拟结果。被驱动装置的运动与计算值很好地吻合。
We introduce a new concept of thermal micro-actuators combined with electrical sensor device to capture and characterize individual living bio-cell. In our micro fabricated device, cantilevers integrated with sensing part (surface micro-machined poly-silicon) and actuation using the difference of the thermal expansion coefficients between poly-Si and transparent thick polymer (SU-8), are built from a flow channel on the substrate. This paper deals with the detail fabrication, actuation of device and the simulation results for our bimorph probe arrays. The motion of the actuated device is well coincident with the calculated value.