PROPERTIES OF DLC COATING INSIDE OF MICRO-CHANNEL CAVITIES PREPARED WITH PSII
PROPERTIES OF DLC COATING INSIDE OF MICRO-CHANNEL CAVITIES PREPARED WITH PSII
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PSII 制备的微通道腔内 DLC 涂层的性能
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发表时间：
2013
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随着零件的小型化，摩擦对微成形过程的影响比宏观成形过程中的影响更加明显。由于摩擦尺寸效应的存在，液体润滑不适合微成形。 DLC涂层因其优越的摩擦学特性而受到更多关注。在这项研究中，开发了几种具有 0.6 毫米至 1.4 毫米不同宽度的微通道的模具。选择等离子体源离子注入（PSII）在微通道模具内表面沉积DLC涂层，通过测量微通道内部DLC涂层的性能来分析微通道尺寸效应。 DLC涂层的表面形貌表明DLC涂层表现出明显的岛状生长。随着微通道宽度的减小和距上表面距离的增加，纳米硬度变小。这表明机械性能变差。划痕试验表明，失效模式是高接触压力下的脆性断裂。随着沟道宽度的减小，即使基体塑性变形较大，DLC涂层破裂，DLC涂层也不易剥落。 sp 3 和sp 2 键的比例随通道宽度和距上表面的距离而改变。 DLC涂层中sp 3 键的比例变小。上述结果表明，DLC涂层的机械性能随着通道宽度的减小而变差，而附着强度则有所提高。
With the miniaturization of parts, friction has more obvious effect on the microforming process than that in macroforming. For the existing of friction size effect, liquid lubrication is not suitable for the microforming. More attentions have been paid to DLC coating for its superior tribological characteristics. In this investigation, several dies with micro-channel of different width from 0.6 mm to 1.4 mm were developed. Plasma source ion implantation (PSII) was selected to deposit DLC coating at the inner surface of micro channel dies, and analysis of micro-channel dimension effect was carried out by measuring the properties of DLC coating inside of micro- channels. The surface topography of DLC coating shows that the DLC coating exhibits an obvious island growth. With decreasing of micro-channel width and increasing of distance from upper surface, the nanohardness becomes small. This indicates that the mechanical properties become poor. Scratch tests show that the failure mode is brittle fracture for high contact pressure. With the decreasing of channel width, the DLC coating is not easily peeled off even when DLC coating is broken for the large plastic deformation of substrate. The ratio of sp 3 and sp 2 bonds is changed by the channel width and distance from upper surface. The fraction of sp 3 bond in DLC coating becomes smaller. The results shown above indicate the mechanical properties of DLC coating becomes poor with decreasing of channel width, and the adhesion strength is improved.