Nanocrystalline SnO2 film prepared by the aqueous sol-gel method and its application as sensing films of the resistance and SAW H2S sensor
Nanocrystalline SnO2 film prepared by the aqueous sol-gel method and its application as sensing films of the resistance and SAW H2S sensor
复制标题
水溶胶凝胶法制备纳米SnO2薄膜及其作为电阻和SAW H2S传感器传感薄膜的应用
DOI：
10.1016/j.snb.2014.10.078
复制
发表时间：
2015-10-01
影响因子：
8.4
通讯作者：
Zheng, Zhiping
中科院分区：
文献类型：
--
作者：
Luo, Wei;Deng, Jianfeng;Zheng, Zhiping
采用二氧化锡(SnO2)作为声表面波(SAW)气体传感器的敏感膜，提高了传感器对H_2S气体的响应性能。然而，传统的溶胶-凝胶法不适合在声表面波器件上沉积SnO2薄膜，因为溶胶具有很强的酸性，会腐蚀传统金属制成的电极。本文采用一种新型的水溶液非腐蚀性溶胶-凝胶法在声表面波器件衬底上沉积SnO2薄膜，电极腐蚀小。所制备的溶胶为弱碱性、无腐蚀性，在烧结过程中防止了电极与空气的接触。研究了所制备薄膜的表面形貌和微结构，并研究了薄膜的硫化氢敏感性能。气敏结果表明，所制备的SnO2薄膜在60℃时对13.7ppm的硫化氢具有最高的电阻响应(膜在空气中的电阻与在硫化氢中的电阻之比)58,057，且对硫化氢的检测具有良好的选择性。该SAW气体传感器在室温和低相对湿度条件下具有良好的检测性能。该方法也可用于制备其他声波传感器的传感膜。(C)2014爱思唯尔B.V.保留所有权利。
Tin oxide (SnO2) has been employed as the sensitive film of surface acoustic wave (SAW) gas sensor, which enhanced the sensor performance toward H2S gas. However, the conventional sol-gel method is unfit for depositing SnO2 films on SAW devices as the sol can corrode the electrodes made of conventional metals due to its strong acidity. In this paper, a new aqueous and non-corrosive sol-gel method was adopted to deposit SnO2 films on SAW device substrate with little corrosion of electrodes. The prepared sol is weak alkaline and noncorrosive, which prevent the contact between the electrodes and the air during the sintering process. The surface morphology and microstructure of the prepared films were investigated and the H2S sensing properties of the films were studied. The gas sensing results showed that the prepared SnO2 films have the highest resistance response (the ratio of film resistance in air versus in H2S) 58,057 toward 13.7 ppm H2S at 60 degrees C and good selectivity for H2S detection. The SAW gas sensors had a good performance for detecting H2S at room temperature and at low relative humidity. This method can also be applied to prepare the sensing membrane of the other acoustic wave sensors. (C) 2014 Elsevier B.V. All rights reserved.