PZT Thin Films Deposited on Copper-Coated Polymer Film Substrates
PZT Thin Films Deposited on Copper-Coated Polymer Film Substrates
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DOI:
10.1080/00150193.2012.676961
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发表时间:
2012-01
期刊:
影响因子:
0.8
通讯作者:
A. Kleiner;G. Suchaneck;B. Adolphi;A. Ponomareva;G. Gerlach
中科院分区:
文献类型:
--
作者:
A. Kleiner;G. Suchaneck;B. Adolphi;A. Ponomareva;G. Gerlach
In this work, we investigate microstructure and composition of nanocrystalline lead-titanium-zirconium oxide thin films reactively sputtered directly on copper-coated polymer films without intentionally substrate heating. Film microstructure characterization was carried out by scanning probe microscopy. Surface topography was described by fractal dimension. Composition analysis was performed by means of X-ray photoelectron spectroscopy.