Effects of laser processing parameters on properties of laser-induced graphene by irradiating CO2 laser on polyimide
Effects of laser processing parameters on properties of laser-induced graphene by irradiating CO2 laser on polyimide
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DOI：
10.1007/s11431-021-1918-8
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发表时间：
2021-12-06
影响因子：
4.6
通讯作者：
Cheng, HuanYu
中科院分区：
文献类型：
--
作者：
Liu, Ming;Wu, JiaNan;Cheng, HuanYu
利用直接激光书写的方法碳化聚酰亚胺（PI）的新兴技术因其灵活性、多功能性和易于图图化的能力而受到广泛关注，可用于制造各种功能的激光诱导石墨烯（LIG）传感器和器件。采用扫描电子显微镜（SEM）、x射线衍射仪（XRD）、透射电子显微镜（TEM）、比表面积分析仪、同步热分析和拉曼光谱对CO2激光辐照制备的LIG薄膜进行了表征，重点研究了激光参数（如功率、扫描速度）对LIG的微观结构、厚度和片阻的影响。TEM和XRD分析表明，LIG由多层石墨烯层组成，层间距为0.34 nm。LIG的比表面积随激光功率的增加而减小。LIG的厚度与炭化PI膜的深度之比作为膨胀率表征LIG的膨胀性。利用激光扫描光斑的叠加机理，解释了图像分辨率和离焦值对激光激光光栅薄片电阻的影响。
The emerging technique of carbonization of polyimide (PI) by direct laser writing receives great attention for its flexibility, versatility, and ease-of-patterning capability in creating a variety of functional laser-induced graphene (LIG) sensors and devices. LIG prepared by CO2 laser irradiating of the PI film is characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), transmission electron microscope (TEM), specific surface area analyzer, synchronous thermal analysis, and Raman spectroscopy with the focus on investigating the effects of laser parameters (e.g., power, scanning speed) on the microstructure, thickness, and sheet resistance of LIG. Both TEM and XRD indicate that LIG is composed of many graphene layers with a layer spacing of 0.34 nm. The specific surface area of LIG decreases with the increase of laser power. The ratio of the thickness of LIG over the depth of the carbonized PI film as the expansion ratio characterizes the expansibility of LIG. The influence of image resolution and off-focus value on the sheet resistance of LIG is explained by the superposition mechanism of laser scanning spots.