Structure stability of hydrogenated amorphous carbon film during thermal annealing
Structure stability of hydrogenated amorphous carbon film during thermal annealing
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DOI：
10.1016/0022-3093(95)00672-9
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发表时间：
1995-05
影响因子：
3.5
通讯作者：
X.-M. Tang;J. Weber;S. Mikhailov;C. Müller;W. Hänni;H. Hintermann
中科院分区：
文献类型：
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作者：
X.-M. Tang;J. Weber;S. Mikhailov;C. Müller;W. Hänni;H. Hintermann
通过测量在真空中分步在不同温度下退火的薄膜的剩余氢浓度分布、拉曼光谱和红外光谱，研究了在 Ar 和 C2H2 混合物中通过射频磁控溅射沉积的 a-C:H 薄膜的热稳定性。退火过程中a-C:H膜中氢的释放不受氢和碳氢化合物扩散过程的限制。相反，发生氢气和碳氢化合物的快速流出和解吸。当温度 T > 450°C 时，渗出率迅速增加。在退火过程中，sp3-和sp2-键合的碳氢化合物都被解吸。通过在 T ≤ 450°C 下退火，通过从簇边缘解吸氢和碳氢化合物来减小 sp2 键合碳簇的尺寸，但在 T > 450°C 时会发生簇重构过程，这会导致簇尺寸增加。 sp2簇的重建优先通过烯属sp2CH结构的转变发生。
The thermal stability of an a-C:H film deposited by rf magnetron sputtering in a mixture of Ar and C2H2was studied by measuring the remaining hydrogen concentration profile, the Raman and infrared spectra of the film annealed in vacuum, in steps at different temperatures. The evolution of hydrogen in the a-C:H film during annealing is not limited by diffusion processes of hydrogen and hydrocarbon. Rather, a rapid effusion and desorption of hydrogen and hydrocarbon occurs. The effusion rate increases rapidly at temperatures T > 450°C. During annealing, both sp3- and sp2-bonded hydrocarbons are desorbed. The sizes of the sp2-bonded carbon clusters are reduced by the desorption of hydrogen and hydrocarbon from the clusters edges by annealing at T ≤ 450°C, but a cluster reconstruction process takes place at T > 450°C, which causes an increase of the cluster size. The reconstruction of the sp2clusters occurs preferentially through transformation of the olefinic sp2CH structure.