Junli Wang, Liwei Zhao, Nam Hoai Luu, Dong Wang, Hiroshi Nakashima: "Structural and electrical properties of Zr oxide film for high-k gate dielectrics by using Electron cyclotron resonance plasma sputtering"Applied Physics A. (印刷中).
Junli Wang, Liwei Zhao, Nam Hoai Luu, Dong Wang, Hiroshi Nakashima: "Structural and electrical properties of Zr oxide film for high-k gate dielectrics by using Electron cyclotron resonance plasma sputtering"Applied Physics A. (印刷中).
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Junli Wang、Liwei Zhao、Nam Hoai Luu、Dong Wang、Hiroshi Nakashima:“利用电子回旋共振等离子体溅射技术研究高 k 栅极电介质 Zr 氧化膜的结构和电学特性”AppliedPhysics A.(出版中)。
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