A point-like source of extreme ultraviolet radiation based on a discharge in a non-uniform gas flow, sustained by powerful gyrotron radiation of terahertz frequency band
A point-like source of extreme ultraviolet radiation based on a discharge in a non-uniform gas flow, sustained by powerful gyrotron radiation of terahertz frequency band
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基于不均匀气流放电的点状极紫外辐射源，由太赫兹频段的强大回旋管辐射维持
DOI：
10.1063/1.4900751
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发表时间：
2014
影响因子：
4
通讯作者：
A. Vodopyanov
中科院分区：
文献类型：
--
作者：
M. Glyavin;S. Golubev;I. Izotov;A. Litvak;A. Luchinin;S. Razin;A. Sidorov;V. Skalyga;A. Vodopyanov
本文讨论了极紫外点光源的可能性和发展前景。紫外光源是基于放电维持强大的太赫兹（THz）频带的回旋辐射的非均匀气流注入到真空体积通过喷嘴直径小于1毫米。最近发展的具有适当功率水平的太赫兹波段回旋管使得这种放电成为可能。本文介绍了利用0.67 THz回旋管100 kW辐射产生点状等离子体的首次实验结果。在小于1 mm的区域内放电定位的可能性被证明。研究了112 ~ 650 nm波长范围内的放电发射。在112-180 nm范围内的光发射的测量功率被测量为高达10 kW。
The possibility and prospects of extreme ultraviolet (UV) point-like source development are discussed in the present paper. The UV source is based on the discharge sustained by powerful gyrotron radiation of terahertz (THz) frequency band in non-uniform gas flow injected into vacuum volume through a nozzle with diameter less than 1 mm. Recent developments of THz-band gyrotrons with appropriate power level made such discharges possible. First experimental results on a point-like plasma creation by 100 kW radiation of 0.67 THz gyrotron are presented. The possibility of discharge localization within the area less than 1 mm is demonstrated. The discharge emission within the wavelength range from 112 nm to 650 nm was studied. The measured power of light emission in the range of 112–180 nm was measured to be up to 10 kW.