Design and performance evaluation of an interferometric controlled planar nanopositioning system
Design and performance evaluation of an interferometric controlled planar nanopositioning system
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DOI：
10.1088/0957-0233/23/7/074011
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发表时间：
2012-06
影响因子：
2.4
通讯作者：
S. Hesse;C. Schäffel;H. Mohr;M. Katzschmann;H. J. Büchner
中科院分区：
文献类型：
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作者：
S. Hesse;C. Schäffel;H. Mohr;M. Katzschmann;H. J. Büchner
半导体或光学行业等高科技应用需要定位系统提供纳米范围内的重复性和不确定性以及数百毫米的 x、y 行程范围。我们通过研究集成平面直接驱动器在实现纳米定位和纳米测量机（NPM/NMM）中的适用性来为这项研究做出贡献。本文介绍了平面集成直接驱动的概念，并解释了在 x 和 y 方向上 100 mm 圆形行程范围内实现的系统的工程设计。它介绍了驱动系统参数以及主要部件的布置和相互作用。给出了初始操作的结果，特别关注如何通过自由浮动滑块将闭环系统投入运行的问题。定位性能的评估结果是，在行程范围内的任意位置处实现了小于exy = 1.3 nm的2D伺服误差。经过反复阶跃响应测试，定位分辨率为0.5 nm。对空气静力支撑滑块的一致 z 方向运动的测量产生标准偏差为 σz = 0.45 nm 的 z 方向振动。对于驱动系统，这些结果代表了该设置所能达到的极限，因为测量的误差运动处于固定环境设置的噪声范围内。通过测量完全组装的系统中空气静压滑块支撑的特性，可以确定当前的空气轴承刚度，并且基于滑块特征频率的有限元模拟，预计对力传递行为的影响很小。
High technology applications for example in the semiconductor or the optical industry require positioning systems providing repeatability and uncertainty in the range of nanometers together with x-, y-travel ranges of several hundreds of millimeters. We contribute in this research by investigating the applicability of integrated planar direct drives for the realization of nanopositioning- and nanomeasuring machines (NPM/NMM). The paper introduces the concept of planar integrated direct drives and explains the engineering design of the realized system for a 100 mm circular travel range in x and y. It presents the drive system parameters and the arrangement and interaction of the main components. The results of the initial operation are presented with a special focus on the question how the closed loop system can be taken into operation with a free floating slider. The evaluation of the positioning performance leads to the result that a 2D servo error of less than exy = 1.3 nm is achieved at arbitrary positions within the travel range. As a result of repeated step response tests, the positioning resolution is 0.5 nm. The measurement of the coincidental z-movement of the aerostatically supported slider yields a z-vibration with a standard deviation of σz = 0.45 nm. Regarding the drive system these results represent the limit of what can be reached with this setup as the measured error motions are in the range of the noise of the fixed environment setup. By measuring the characteristics of the aerostatic slider support at the fully assembled system the present air bearing stiffness is determined and based on a FEM-simulation of the slider eigenfrequencies the influence on the force transfer behavior is expected to be only marginal.