Design and fabrication of a multipurpose cilia cluster MEMS vector hydrophone
Design and fabrication of a multipurpose cilia cluster MEMS vector hydrophone
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DOI：
10.1016/j.sna.2019.07.012
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发表时间：
2019-09-01
影响因子：
4.6
通讯作者：
Zhang, Wendong
中科院分区：
文献类型：
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作者：
Zhang, Lansheng;Xu, Qingda;Zhang, Wendong
以往的纤毛MEMS矢量水听器由于受频带的限制，主要用于远程舰船的噪声监测。此外，通常采用在纤毛上添加附加物的方法来提高灵敏度，这增加了制作、二次集成和生产一致性的难度。基于鱼类感觉细胞上的多纤毛仿生原理，设计了一种纤毛簇MEMS矢量水听器。这种微结构不仅提高了水听器的灵敏度，而且在不增加纤毛附件的情况下，设计了一个合适的频段，用于监测船舶和一些有价值的海洋物种。首先，建立数学模型进行理论分析。然后进行仿真分析，验证理论分析的正确性，同时找到纤毛的最佳尺寸。其次，纤毛簇MEMS矢量水听器由于纤毛的性质相同，工艺集成，制作简单。测试结果表明，在20 Hz ~ 1 kHz的频率范围内，水听器的灵敏度可达-183.3 dB@1600 Hz（0 dB ref.1 V/uPa），提高了9.6 dB。此外，灵敏度每倍频程提高了6dB。8字形指向性的凹点深度超过30 dB，表明CCVH在水下应用中具有良好的前景。(C)2019爱思唯尔B. V.保留所有权利。
The previous cilia MEMS vector hydrophone were mainly aimed at monitoring the noises of remote ships due to the limitation of frequency band. Moreover, the methods of adding appendants to cilia were usually used to improve the sensitivity, which increased the difficulty of fabrication, secondary integration and the consistency of production. In this paper, based on the bionic principle of multiple cilia on fishes' sense cells, a cilia cluster MEMS vector hydrophone(CCVH) is designed. This micro-structure not only improves the sensitivity of hydrophone without adding appendants to cilia, but also designs a suitable frequency band to monitor ships and some valuable marine species. Firstly, a mathematical model is established for theoretical analysis. Then, simulation analysis is carried out to verify the correctness of theoretical analysis, and the optimal size of cilia is found simultaneously. Secondly, the fabrication of cilia cluster MEMS vector hydrophone is more simpler because the cilia have the same properties and integrated process. Finally, test results show that the sensitivity of hydrophone has been increased by 9.6 dB, which can reach up to -183.3 dB@1600 Hz(0 dB ref.1 V/uPa) with the frequency band in the range of 20 Hz-1 kHz. Besides, the sensitivity is increased by 6 dB per octave. Concave point depth of 8-shaped directivity is beyond 30 dB, which indicates that CCVH is promising in underwater application. (C) 2019 Elsevier B.V. All rights reserved.