A study of parametric excitation applied to a MEMS tuning fork gyroscope
A study of parametric excitation applied to a MEMS tuning fork gyroscope
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MEMS音叉陀螺参数激励研究
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发表时间：
2007
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通讯作者：
Yongsik Lee
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作者：
Yongsik Lee
当前MEMS（微机电系统）陀螺仪通常采用静电力激励梳状驱动器，存在精度低、耦合问题和鲁棒性差等局限性。我们建议使用参数激励来解决这些问题。参数激励的优点是可以外化，从而简化了制造过程。提出了用双摆模型进行参数激励的可行性研究。利用拉格朗日方程推导了控制方程，并用MATLAB程序对结果进行了仿真。在不同的初始条件下，对对称运动和反对称运动两种摆动模式进行了说明和研究。对音叉梁进行了实验研究。对于非接触运动分析，采用Eagle三维运动分析数码相机系统。讨论了开环激振法引起的激振器功率有限等实际问题。提出了一个考虑次侧振动阻尼效应的控制方程，并将其解析解与实验结果进行了比较。得到了很好的定性一致性。为了阐明音叉梁的软化非线性，对竖直摆和倒立摆两种情况下的重力效应进行了描述。
The current MEMS (Micro-Electro-Mechanical System) gyroscopes which normally use the electro static force to excite the comb drive are faced with the limitations such as low precision, coupling problem, and poor robustness. We propose to use parametric excitation to solve those problems. The advantage of the parametric excitation is that it can be externalized, thus, the fabrication process can also be simplified. A feasibility study of the parametric excitation using a two-pendulum model is presented. Governing equations are derived by Lagrange equation, and the results are simulated using MATLAB program. Two swing patterns, symmetric and anti-symmetric motion, are illustrated and investigated with different initial conditions. An experimental study of a tuning fork beam is presented. For non-contact motion analysis, an Eagle 3-D motion analysis digital camera system is employed. We discuss the practical problems such as limited shaker power, which is caused by open-loop excitation method. A governing equation including the damping effect by the lateral vibration of the tines is presented, and its analytical solution is compared with the experimental results. A good qualitative agreement is obtained. To clarify the softening nonlinearity of the tuning fork beam, the gravity effect is described for both vertical and inverted pendulum cases.