Tactile sensor array using microcantilever with nickel-chromium alloy thin film of low temperature coefficient of resistance and its application to slippage detection
Tactile sensor array using microcantilever with nickel-chromium alloy thin film of low temperature coefficient of resistance and its application to slippage detection
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DOI：
10.1016/j.sna.2011.12.055
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发表时间：
2012-10-01
影响因子：
4.6
通讯作者：
Noma, Haruo
中科院分区：
文献类型：
--
作者：
Sohgawa, Masayuki;Hirashima, Daiki;Noma, Haruo
通过表面微加工技术，利用低噪声的镍铬薄膜应变计制造了一种由微悬臂梁组成的触觉传感器，并利用所制造的触觉传感器阵列检测到了滑动。含铬75%（重量比）的镍铬合金薄膜具有极低的电阻温度系数（TCR），可用于抑制温度噪声和漂移。采用含铬75%（重量比）的镍铬薄膜制造的触觉传感器，其电阻与法向力和剪切力呈线性关系，且与采用常规含铬20%（重量比）的镍铬薄膜制造的传感器相比，具有更低的噪声和温度漂移。所制造的传感器测量的法向力和剪切力与施加的力吻合良好，误差为3 - 3.5 kPa。此外，利用所制造的触觉传感器阵列检测了机器人手的抓取状态，并且能够以76.5%的准确率判断滑动情况。© 2012 Elsevier B.V. 保留所有权利。
A tactile sensor consisting of microcantilevers has been fabricated using the NiCr-thin-film strain gauge with low noise by surface micromachining and the slippage has been detected by using the fabricated tactile sensor array. The NiCr alloy thin film of Cr: 75 wt% has very low temperature coefficient of resistance (TCR) and is employed to suppress the temperature noise and drift. The fabricated tactile sensor with the NiCr thin film (Cr: 75 wt%) has linear dependencies of the resistance on normal and shear forces, and shows lower noise and temperature drift than that with conventional NiCr (Cr: 20 wt%) film. Normal and shear forces measured by fabricated sensor well coincide with applied forces with errors of 3-3.5 kPa. Moreover, the gripping status of the robotic hand was detected by using fabricated tactile sensor array, and the slipping condition can be judged at the rate of 76.5%. A (C) 2012 Elsevier B.V. All rights reserved.