Probe measurement of an ECR hydrogen plasma facing the C12A7 electride surface
Probe measurement of an ECR hydrogen plasma facing the C12A7 electride surface
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面向 C12A7 电子化物表面的 ECR 氢等离子体的探针测量
DOI：
10.1088/1742-6596/2244/1/012048
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发表时间：
2022
期刊：
影响因子：
--
通讯作者：
Wada M.
中科院分区：
文献类型：
--
作者：
Bito K.;Sasao M.;Wada M.
用朗缪尔探针测量了一台可更换等离子体电极（PE）的小型离子源中ECR放电的等离子体参数。安装PE是为了研究钼PE如何改变等离子体参数。通过改变探头沿着束流引出方向的轴向位置，阐明了材料对PE前等离子体参数的影响。测得的探针特性的分析表明，钼PE具有更高的电子密度（ne）和更低的电子温度（Te）比钼PE。当PE负偏置时，电子态PE的正饱和电流（I i）与负饱和电流（I e+ I h-）之比约为Mo PE的1.6倍。
Plasma parameters of an ECR discharge excited in a compact ion source with a replaceable plasma electrode (PE) were measured with a Langmuir probe. The PE was installed to investigate how an electride PE changes the plasma parameters from those with a Mo PE. The effect upon the plasma parameters in front of the PE due to the material will be elucidated by changing the probe position axially along the beam extraction direction. Analyses of the measured probe characteristics revealed that electride PE has a higher electron density (ne) and lower electron temperature (Te) than the Mo PE. When the PE was biased negatively, the ratio of the positive saturation current (I i) to the negative saturation current (I e+ I h-) for the electride PE was about 1.6 times of the ratio for the Mo PE.