First results from a next-generation off-plane X-ray diffraction grating

First results from a next-generation off-plane X-ray diffraction grating
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下一代离面 X 射线衍射光栅的第一个结果

DOI:
10.1007/s10686-013-9338-1
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发表时间:
2013
影响因子:
3
通讯作者:
McEntaffer R
McEntaffer R
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
McEntaffer R

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未来的NASA X射线光谱任务将需要高通量、高分辨率的光栅光谱仪。离面反射光栅能够满足实现这些任务的科学目标所需的性能要求。我们已经确定了一种新的光栅制造方法,利用普通的光刻和微细加工技术,以产生高保真度的凹槽轮廓,以实现这一性能。该工艺的应用产生了初始预母版,其表现出径向(沿着凹槽尺寸的可变线间距)、高密度(> 6000个凹槽/mm)、层压轮廓。该预母版已在BESSY II同步加速器光设施中进行了衍射效率测试,并将高达55%的入射光衍射成可用的光谱级。此外,光谱分辨能力的测试表明,这些光栅能够获得远高于1300(λ/Δλ)的分辨能力,其限制是由于测试装置而不是光栅。获得这些结果提供了信心,这种制造过程是能够产生下一代的X射线天文台的离面反射光栅。
Future NASA X-ray spectroscopy missions will require high throughput, high resolving power grating spectrometers. Off-plane reflection gratings are capable of meeting the performance requirements needed to realize the scientific goals of these missions. We have identified a novel grating fabrication method that utilizes common lithographic and microfabrication techniques to produce the high fidelity groove profile necessary to achieve this performance. Application of this process has produced an initial pre-master that exhibits a radial (variable line spacing along the groove dimension), high density (> 6000 grooves/mm), laminar profile. This pre-master has been tested for diffraction efficiency at the BESSY II synchrotron light facility and diffracts up to 55 % of incident light into usable spectral orders. Furthermore, tests of spectral resolving power show that these gratings are capable of obtaining resolving powers well above 1300 (λ/Δλ) with limitations due to the test apparatus, not the gratings. Obtaining these results has provided confidence that this fabrication process is capable of producing off-plane reflection gratings for the next generation of X-ray observatories.
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