Formation of three-dimensional Parylene C structures via thermoforming
Formation of three-dimensional Parylene C structures via thermoforming
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DOI：
10.1088/0960-1317/24/6/065003
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发表时间：
2014-06-01
影响因子：
2.3
通讯作者：
Meng, E.
中科院分区：
文献类型：
--
作者：
Kim, B. J.;Chen, B.;Meng, E.
利用聚对二甲苯C的热塑性性质，能够使用热成型（热成型）技术形成三维结构。热成型涉及将聚对二甲苯膜加热到其玻璃化转变温度以上，同时将其物理限制在最终所需的构象中。使用热成型工艺开发了由Parylene薄膜组成的微观和宏观尺度的三维结构，并对其所产生的化学和机械变化进行了表征。在真空中进行的热成型过程后，没有观察到聚合物的表面和本体化学的大的变化。热处理的结构表现出增加的刚度最多37%，这取决于处理温度，由于聚对二甲苯聚合物的结晶度的增加。该研究揭示了由该过程引起的重要性质变化，即（1）在小曲率半径（30-90 μ m）的热成型区域中产生高应变，和（2）在热成型多层聚对二甲苯-聚对二甲苯和聚对二甲苯-金属-聚对二甲苯膜中类似于1.5%的本体材料收缩。热成型是一种简单的工艺，由此可以从基于聚对二甲苯C的薄膜结构获得三维结构，其具有作为处理温度的函数的可调机械性能。
The thermoplastic nature of Parylene C is leveraged to enable the formation of three-dimensional structures using a thermal forming (thermoforming) technique. Thermoforming involves the heating of Parylene films above its glass transition temperature while they are physically confined in the final desired conformation. Micro and macro scale three-dimensional structures composed of Parylene thin films were developed using the thermoforming process, and the resulting chemical and mechanical changes to the films were characterized. No large changes to the surface and bulk chemistries of the polymer were observed following the thermoforming process conducted in vacuum. Heat treated structures exhibited increased stiffness by a maximum of 37% depending on the treatment temperature, due to an increase in crystallinity of the Parylene polymer. This study revealed important property changes resulting from the process, namely (1) the development of high strains in thermoformed areas of small radii of curvature (30-90 mu m) and (2) similar to 1.5% bulk material shrinkage in thermoformed multilayered Parylene-Parylene and Parylene-metal-Parylene films. Thermoforming is a simple process whereby three-dimensional structures can be achieved from Parylene C-based thin film structures with tunable mechanical properties as a function of treatment temperature.