A multiaxis force sensor for the study of insect biomechanics
A multiaxis force sensor for the study of insect biomechanics
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DOI：
10.1109/jmems.2007.893677
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发表时间：
2007-06-01
影响因子：
2.7
通讯作者：
Kenny, Thomas W.
中科院分区：
文献类型：
--
作者：
Bartsch, Michael S.;Federle, Walter;Kenny, Thomas W.
昆虫奔跑的速度和敏捷性远远超过迄今为止生产的最先进的腿式机器人。奔跑的昆虫如蟑螂B的单足地面反作用力。盘状肌提供了宝贵的洞察力，这种快速强大的运动的生物力学基础。为了更好地研究这些昆虫的运动学和生物力学，多轴硅微机械力传感器已被制作。该传感器由一个5.3毫米的正方形板组成，该板在其拐角处由薄的弹簧状梁元件支撑。每个挠性梁都装有两个压阻式应变计，可以测定法向和面内弯曲力分量。典型的未放大的正常和面内弯曲力的灵敏度分别为55和12 V/N，已被证明为18 μ m厚的弯曲和1.3 kHz的机械带宽的传感器。标称法向力分辨率在1 kHz时为2.2 nN/Hz（1/2）。本文详细介绍了第一代微机械地面反作用力传感器的设计，制造，校准，性能和分析建模。从奔跑的蟑螂身上获得的初步数据表明，这种传感器比以前用于研究小动物生物力学的技术在性能上有了显着的改进。
Insects run with far greater speed and agility for their size than even the most advanced legged robots produced to date. The single-leg ground reaction forces of running insects such as the cockroach B. discoidalis provide valuable insight into the biomechanical basis for this rapid robust locomotion. To better study the running kinematics and biomechanics of these insects, a multiaxis silicon micromachined force sensor has been fabricated. The sensor consists of a 5.3-mm square plate that is supported at its corners by thin springlike beam elements. Each flexure beam is instrumented with two piezoresistive strain gauges, allowing the determination of both normal and inplane bending force components. Typical unamplified normal and in-plane flexure force sensitivities of 55 and 12 V/N, respectively, have been demonstrated for a sensor with 18-mu m-thick flexures and a mechanical bandwidth of 1.3 kHz. Nominal normal force resolution is 2.2 nN/Hz(1/2) at 1 kHz. This paper details the design, fabrication, calibration, performance, and analytical modeling of the first-generation micromachined ground reaction force sensor. Preliminary data obtained from running cockroaches show that this sensor represents a marked improvement in performance over the techniques previously available for studying small-animal biomechanics.