Combinatorial approach to the fabrication of organic thin films

Combinatorial approach to the fabrication of organic thin films
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有机薄膜制造的组合方法

DOI:
10.1016/j.apsusc.2005.06.038
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发表时间:
2006
影响因子:
6.7
通讯作者:
H. Koinuma
H. Koinuma
中科院分区:
材料科学1区
文献类型:
--
作者:
K. Itaka;Mitsugu Yamashiro;Junpei Yamaguchi;Seiichiro Yaginuma;M. Haemori;H. Koinuma

文献摘要

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我们展示了有机薄膜制备研究中的组合方法。“组合衬底筛选”是指同时在几种衬底上沉积,有助于选择合适的衬底生长有机薄膜。“组合厚度梯度薄膜”可以使用在沉积过程中从衬底的一个边缘连续移动到另一个边缘的移动掩膜来制造。该组合厚度梯度薄膜可作为沉积过程中薄膜生长时间演化的文库。这种映射可以作为研究薄膜生长初期的有力方法。此外,组合厚度梯度薄膜可用于检测缓冲层效应。这些技术使我们能够快速优化高质量有机薄膜的制造。
We demonstrate combinatorial approach in investigation of organic thin film fabrication. “Combinatorial substrate screening”, which is the deposition onto several kinds of substrates simultaneously, is useful to choose suitable substrate for organic thin film growth. “Combinatorial thickness-gradient films” can be fabricated using a moving mask which travels from an edge to another edge of substrate continuously during the deposition. The combinatorial thickness-gradient film can be regarded as the library for time evolution of film growth during the deposition. This mapping can serve as a powerful method for the research of growth of thin film in an initial stage. Besides, combinatorial thickness-gradient film can be utilized for the examination of a buffer layer effect. These techniques enable us to quickly optimize for the fabrication of high-quality organic thin films.