The effect of elastic anharmonicity on the nonlinear behavior of waveguide-based AlN resonator
The effect of elastic anharmonicity on the nonlinear behavior of waveguide-based AlN resonator
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弹性非谐性对波导 AlN 谐振器非线性行为的影响
DOI：
10.1109/fcs.2017.8088788
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发表时间：
2017
期刊：
影响因子：
--
通讯作者：
R. Tabrizian
中科院分区：
文献类型：
--
作者：
M. Ghatge;R. Tabrizian
本文研究了AlN薄膜中的弹性非谐性对外延AlN谐振器非线性性能的影响。弹性能量分布通过波导的色散工程来定制，以避免边界引起的非线性，并能够研究弹性非谐性对幅频（A-f）特性的贡献。演示了Q为2，250的97 MHz谐振器，线性A-f系数为-3.47 ppm/μm2，屈服功率为5dBm。超过这个屈服功率的设备的激励派生的AlN膜进入塑性状态，并引起谐振器频率响应的滞后。在设备的弹塑性循环中一致的Q表明非结构性能量耗散机制的主要贡献。
This paper presents the effect of elastic anharmonicity in AlN film on the nonlinear performance of extensional AlN resonators. Elastic energy distribution is tailored through dispersion engineering of the waveguide to avoid boundary-induced nonlinearities and enable the study of the elastic anharmonicity contribution on the amplitude-frequency (A-f) characteristic. A 97MHz resonator with a Q of ∼2,250 is demonstrated with a linear A-f coefficient of −3.47 ppm/μm2 and a yield power of 5dBm. Excitation of the device beyond this yield power derives the AlN film into plastic regime and induces a hysteresis in resonator frequency response. A consistent Q over the elastoplastic cycling of the device suggests the dominant contribution of non-structural energy dissipation mechanisms.