Scalable Imprinting of Flexible Multiplexed Sensor Arrays with Distributed Piezoelectricity-Enhanced Micropillars for Dynamic Tactile Sensing
Scalable Imprinting of Flexible Multiplexed Sensor Arrays with Distributed Piezoelectricity-Enhanced Micropillars for Dynamic Tactile Sensing
复制标题
具有分布式压电的柔性多路复用传感器阵列的可扩展压印——用于动态触觉传感的增强型微柱
DOI：
10.1002/admt.202000046
复制
发表时间：
2020-05-05
影响因子：
6.8
通讯作者：
Li, Sheng
中科院分区：
文献类型：
--
作者：
Chen, Xiaoliang;Shao, Jinyou;Li, Sheng
人机交互和电子皮肤的持续革命对触觉传感器提出了新的要求，包括良好的机械灵活性，高灵敏度以及用于检测力分布的分布式像素的可用性。在这里，一个高灵敏度的柔性传感器阵列的基础上，压电增强垂直排列的P（VDF-TrFE）微柱开发的动态触觉传感。核心压电传感微柱使用简单和可扩展的纳米压印技术制造，然后夹在一对交叉电极阵列之间，以构建多路复用传感器阵列。由于所提出的结构设计和纳米压印方法，传感器像素表现出均匀的输出产生，强大的输出稳定性，和可扩展的制造能力。此外，利用高压缩性和增强的应变的压电微柱相比，平面膜，微结构传感器显示出增强的灵敏度为228.2 mV N-1和高度线性的负载响应。通过将柔性传感器与便携式信号处理电路集成，成功地开发了一个完整的触觉传感系统，以提供清晰直观的用户界面。传感器阵列的良好柔性和鲁棒稳定性使其能够附着在曲面上，用于动态力的实时跟踪和力分布的成像。
The ongoing revolution of human-robot interactions and electronic skins has created new requirements for tactile sensors, including good mechanical flexibility, high sensitivity, and the availability of distributed pixels for detecting force distribution. Here, a highly sensitive flexible sensor array based on piezoelectricity-enhanced vertically aligned P(VDF-TrFE) micropillars is developed for dynamic tactile sensing. The core piezoelectric sensing micropillars are fabricated using a straightforward and scalable nanoimprinting technology and then sandwiched between a pair of cross electrode arrays to construct multiplexed sensor arrays. Due to the proposed structural design and nanoimprinting methodology, the sensor pixels exhibit uniform output generation, robust output stability, and scalable fabrication ability. In addition, taking advantage of the high compressibility and enhanced strain of the piezoelectric micropillars compared to planar films, the microstructured sensors show an enhanced sensitivity of 228.2 mV N-1 and a highly linear response to loads. By integrating the flexible sensor with a portable signal processing circuit, a complete tactile sensing system is successfully developed to provide clear intuitive user interfaces. The good flexibility and robust stability of the sensor arrays enable them to be attached onto curved surface for real-time tracking of dynamic force and imaging the force distribution.