Effect of Ion Fluence on Crystallization of TiNi Film made by Sputter Deposition with Simultaneous Ion Irradiation
Effect of Ion Fluence on Crystallization of TiNi Film made by Sputter Deposition with Simultaneous Ion Irradiation
复制标题
离子注量对同步离子辐照溅射沉积TiNi薄膜结晶的影响
DOI:
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发表时间:
2010
期刊:
影响因子:
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通讯作者:
N.Ikenaga
中科院分区:
文献类型:
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作者:
T. Hashizume;Y. Hori and C. Mizue;N.Ikenaga