K.Kamimura, et al.: "Preparation of Polycrystalline SiC Thin Films and Its Application to Resistive Sensors" Institute of Physics Conference Series. Vol.142. 825-828 (1996)
K.Kamimura, et al.: "Preparation of Polycrystalline SiC Thin Films and Its Application to Resistive Sensors" Institute of Physics Conference Series. Vol.142. 825-828 (1996)
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K.Kamimura等人:“多晶SiC薄膜的制备及其在电阻传感器中的应用”物理研究所会议系列。
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