Improvement of the PLD process assisted by RF plasma for AlN growth
Improvement of the PLD process assisted by RF plasma for AlN growth
复制标题
射频等离子体辅助的 PLD 工艺改进用于 AlN 生长
DOI：
10.1007/s00339-003-2325-z
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发表时间：
2005
期刊：
影响因子：
--
通讯作者：
J. Perrière
中科院分区：
文献类型：
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作者：
A. Basillais;R. Benzerga;H. Sánchez;E. Le Menn;C. Boulmer;J. Perrière
脉冲激光沉积（PLD）方法特别适合于氧化物薄膜的生长，但是在其它化合物例如氮化物的情况下，PLD呈现出一些限制，这主要是由于与氧相比氮的低反应性。克服这个问题的一种可能的方法是通过“等离子体辅助脉冲激光沉积”来增加组成物质的反应性。等离子体耦合到烧蚀室，以增加反应性原子种类的密度，其可进一步并入生长膜中。本文描述了这种方法以及由各种等离子体诊断确定的等离子体中的原子和分子物种的性质、能量和浓度。这些结果与氮化铝化合物的特定情况下的薄膜生长相关。薄膜的组成和结构的生长条件的函数进行了研究，并证明了额外的放电的积极影响上的膜纯度和性能。PLD技术的基本问题，特别是金属靶，是产生不需要的液滴，显着恶化膜的性能。为了消除这些液滴，薄膜已经生长的实验装置，使用两个目标和交叉的激光束，给出了积极的结果。
The pulsed-laser-deposition (PLD) method is particularly well suited for the growth of oxide thin films, but in the case of other compounds, such as nitrides, PLD presents some limitations which are mainly due to the low reactivity of nitrogen in comparison with oxygen. A possible way to overcome this problem is to increase the reactivity of the constituent species, via ‘plasma assisted-pulsed-laser deposition’. A plasma is coupled to the ablation chamber, in order to increase the density of reactive atomic species, which can be further incorporated in the growing film. This approach is described in this paper as well as the nature, energy, and concentration of the atomic and molecular species in the plasma as determined by various plasma diagnostics. These results are correlated to the growth of thin films in the particular case of the aluminum nitride compound. The composition and structure of the films are studied as a function of the growth conditions, and the positive effects of the additional discharge are evidenced on the film purity and properties. The fundamental problem with the PLD technique, especially with metallic targets, is the production of unwanted droplets that significantly worsen the properties of the films. To eliminate these droplets, a thin film has been grown with an experimental setup using two targets and crossed laser beams which gave positive results.