Ultra-wideband surface acoustic wave devices using Cu-grating/rotated-YX-LiNBO3-substrate structure
Ultra-wideband surface acoustic wave devices using Cu-grating/rotated-YX-LiNBO3-substrate structure
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DOI：
10.1143/jjap.43.3063
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发表时间：
2004-05-01
期刊：
影响因子：
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通讯作者：
Yamaguchi, M
中科院分区：
文献类型：
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作者：
Hashimoto, K;Asano, H;Yamaguchi, M
本文讨论了在Cu光栅/旋转YX-LiNbO 3基片结构上传播的Love模在超宽带低损耗RF声表面波（SAW）滤波器研制中的应用。理论分析表明，采用厚度为波长的百分之几的铜光栅可以实现具有很小电容比的高性能谐振腔。特别是在15 ° YX-LiNbO_3-衬底结构上，由于瑞利模引起的寄生响应可以被有效地抑制。在Cu光栅/15 ° YX-LiNbO_3基片结构上制作了IDT型单端口声表面波谐振器和梯形声表面波滤波器，并对它们的高性能进行了讨论。
This paper discusses the application of Love mode propagating on Cu-grating/rotated YX-LiNbO3-substrate structure to the development of ultra-wideband and low-loss RF surface acoustic wave (SAW) filters. Theoretical analysis suggested that high performance resonators with very small capacitance ratio would be realised using Cu gratings with a thickness of several percent of wavelength. It was also suggested that in particular, on 15degreesYX-LiNbO3-substrate structure, the spurious response due to Rayleigh mode could effectively be suppressed. An IDT-type one-port SAW resonator and a ladder-type SAW filter were fabricated on the Cu-grating/15degreesYX-LiNbO3-substrate structure, and their high performances are demonstrated with discussion.