T.Nishimura, et al.: "The Improvement of Deposition Rate for Al-CVD Using Direct Liquid Injection System" Extended Abstracts (The 46th Spring Meeting, 1999) ; The Japan Society of Applied Physics and Related Societies. 29pZQ-5.
T.Nishimura, et al.: "The Improvement of Deposition Rate for Al-CVD Using Direct Liquid Injection System" Extended Abstracts (The 46th Spring Meeting, 1999) ; The Japan Society of Applied Physics and Related Societies. 29pZQ-5.
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T.Nishimura 等人：“The Improvement of Deposition Rate for Al-CVD using Direct Liquid Injection System”扩展摘要（第 46 届春季会议，1999 年）；
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