Nano electro-mechanical optoelectronic tunable VCSEL.
Nano electro-mechanical optoelectronic tunable VCSEL.
复制标题
纳米机电光电可调谐VCSEL。
DOI：
10.1364/oe.15.001222
复制
发表时间：
2007
期刊：
影响因子：
3.8
通讯作者：
C. Chang
中科院分区：
文献类型：
--
作者：
M.C.Y. Huang;Ye Zhou;C. Chang
报道了一种新型的静电驱动纳米机电光电子（NEMO）可调谐垂直腔面发射激光器（VCSEL），中心波长为850 nm。通过集成可移动的单层（230 nm）高折射率对比度亚波长光栅（HCG）作为VCSEL顶镜，在室温下连续工作，获得了单模发射（SMSR >40 dB）和连续波长调谐（~2.5 nm）。HCG占地面积小，能够将每个悬臂尺寸缩小10倍，导致质量减少1000倍，这可能会增加机械谐振频率和调谐速度。
We report a novel electrostatic actuated nano-electromechanical optoelectronic (NEMO) tunable vertical-cavity surface-emitting laser (VCSEL) centered at 850 nm. By integrating a movable, single-layer (230 nm), high-index-contrast subwavelength grating (HCG) as the VCSEL top mirror, single mode emission (SMSR >40 dB) and continuous wavelength tuning (~2.5 nm) was obtained at room temperature under CW operation. The small footprint of HCG enables the scaling down of each of the cantilever dimensions by a factor of 10, leading to 1000 times reduction in mass, which potentially increases the mechanical resonant frequency and tuning speed.