A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films
A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films
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DOI：
10.1088/0960-1317/16/1/016
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发表时间：
2006-01-01
影响因子：
2.3
通讯作者：
Gué, AM
中科院分区：
文献类型：
--
作者：
Abgrall, P;Lattes, C;Gué, AM
本文报道了完全由SU-8制成的具有集成电极的三维微流控网络的制备。所描述的技术允许在聚酯（PET）片材上制造非交联的SU-8干膜，并随后层压形成封闭的微结构。与其他已报道的方法不同，转移层是按照键合步骤进行图像化的，与使用已图像化层的技术相比，可以更准确、更简单地在层之间进行对齐。证明了完整聚合物微观结构的干释放。获得了柔性微流控芯片。该技术使用简单的工具，不使用晶圆键合机，而是使用更集体的层压技术。对于厚度大于50 μ m的层，已经观察到该方法的局限性，并进行了讨论。通过水力流动实验研究了覆盖层的变形对三维结构中相邻流动的影响。对于厚度为10am且平均压力大于100kpa的层，观察到重要的变形。厚度大于35 μ m、平均压力达到200 kPa时，无变形。在实验设置范围内，即高达300 kPa的范围内没有发生故障。
The fabrication of three-dimensional (3D) microfluidic networks entirely made of SU-8 with integrated electrodes is reported. The described technology allows the fabrication of uncrosslinked SU-8 dry film on a polyester (PET) sheet and its subsequent lamination to form closed microstructures. Unlike other reported methods, transferred layers are patterned following the bonding step allowing a more accurate and simple alignment between levels than techniques using already patterned layers. Dry release of the complete polymer microstructure was demonstrated. Flexible microfluidic chips were obtained. This technique uses simple tools and no wafer bonder is used but lamination techniques which are more collective processes. Limitations in the method for layers thicker than 50 mu m have been observed and are discussed. Hydraulic flow experiments have been performed to study the deformation of the cover layer which could influence adjacent flow in a three-dimensional configuration. Important deformations have been observed for layers 10 Am thick and an average pressure greater than 100 kPa. No deformations have been noted for layers with thicknesses greater than 35 mu m and for average pressures up to 200 kPa. No failures occurred within the range of the experimental set-up, i.e. up to 300 kPa.