Terahertz-wave generation by GaP rib waveguides via collinear phase-matched difference-frequency mixing of near-infrared lasers
Terahertz-wave generation by GaP rib waveguides via collinear phase-matched difference-frequency mixing of near-infrared lasers
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DOI：
10.1063/1.3094012
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发表时间：
2009-03-15
影响因子：
3.2
通讯作者：
Nishizawa, Jun-ichi
中科院分区：
文献类型：
--
作者：
Saito, Kyosuke;Tanabe, Tadao;Nishizawa, Jun-ichi
我们构造脊形波导从GaP材料使用电感耦合等离子体反应离子刻蚀技术的基础上Ar/Cl-2气体的应用。我们得到了一个波导的肋高度为200 μ m。通过近红外光的共线相位匹配差频混频，从GaP晶体脊形波导中产生太赫兹波。对于1 mm宽的脊形波导，对应于基模的太赫兹输出峰值出现在0.75 THz附近。对于200 μ m宽的波导，基模的位置移动到1.32 THz，这可归因于太赫兹波在波导中的二维限制。与平板波导和体GaP晶体相比，脊形波导的转换效率得到了提高。
We constructed rib waveguides from GaP material using an inductively coupled plasma reactive ion etching technique based on Ar/Cl-2 gas application. We obtained a waveguide with a rib height of 200 mu m. Terahertz-wave generation from the GaP-crystal rib waveguides was demonstrated via collinear phase-matched difference-frequency mixing of near-infrared light. The terahertz output peak corresponding to the fundamental modes appeared around 0.75 THz for a 1-mm-wide rib waveguide. The position of the fundamental mode shifted to 1.32 THz for a 200-mu m-wide waveguide, which is attributable to the two-dimensional confinement of the terahertz waves in the waveguide. The conversion efficiency was enhanced in the rib waveguide compared to that in both slab waveguides and bulk GaP crystals.