Reactions between liquid silicon and vitreous silica
Reactions between liquid silicon and vitreous silica
复制标题
液态硅与玻璃态二氧化硅之间的反应
DOI：
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发表时间：
1992
期刊：
影响因子：
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通讯作者：
T. Carlberg
中科院分区：
文献类型：
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作者：
Zhensheng Liu;T. Carlberg
在直拉法生长硅单晶过程中，硅单晶中氧的掺入受多种因素的影响，其中石英坩埚的溶解是一个重要的因素。本文分析了石英玻璃与熔融硅在密封安瓿和直拉坩埚中的反应。结果表明，石英玻璃是通过侧向生长结晶成方石英的。为了使该反应发生，必须存在液态硅。玻璃状二氧化硅溶解，方石英生长，它们之间有一层薄薄的液态硅。与无定形和结晶二氧化硅平衡的熔体中不同的氧浓度对于反应进行是必要的。熔体中的氧通量取决于玻璃状二氧化硅和方石英的溶解以及这些相之间的反应。
Oxygen incorporation in silicon crystals during Czochralski growth is dependent on many factors, of which the dissolution of the silica crucible is of great importance. In this paper the reactions between vitreous silica and molten silicon have been analyzed, both in sealed ampoules and in Czochralski crucibles. It was found that the vitreous silica crystallizes to cristobalite by lateral growth. For this reaction to occur it is necessary that liquid silicon is present. The vitreous silica dissolves and the cristobalite grows with a thin layer of liquid silicon between them. Different oxygen concentrations in the melt in equilibrium with the amorphous and crystallized silica are necessary for the reaction to proceed. The oxygen flux in the melt is dependent upon the dissolution of both vitreous silica and cristobalite as well as the reaction between these phases.