Micro Ultrasonic Motor Using a Cube With a Side Length of 0.5 mm
Micro Ultrasonic Motor Using a Cube With a Side Length of 0.5 mm
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DOI：
10.1109/tmech.2015.2511782
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发表时间：
2016-04-01
影响因子：
6.4
通讯作者：
Mashimo, Tomoaki
中科院分区：
文献类型：
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作者：
Mashimo, Tomoaki
致动器小型化到亚毫米尺度遇到了困难的制造和严重的扭矩耗散所造成的粘附力。本研究提出一种微型超音波马达的设计，使微细加工和马达驱动。定子原型，这是迄今为止报道的最小的超声波电机，包括一个边长为0.5毫米的金属立方体和一个直径为0.33毫米的通孔在其中心，和两个压电元件粘附到其侧面。在两个不同的施加电压下，定子产生驱动力并将其传递到插入通孔中的转子。性能评估表明，该微电机产生的平均角速度为123弧度/秒和0.2 μ N. m的峰值扭矩。这个扭矩值超过了现有的微型电机。
Actuator miniaturization to submillimeter scales encounters difficult fabrication and serious torque dissipation caused by adhesion forces. This study presents a design for micro ultrasonic motors that enables microfabrication and motor actuation. The stator prototype, which is the smallest ultrasonic motor reported to date, comprises a metallic cube with a side length of 0.5 mm and a through-hole of 0.33-mm diameter at its center, and two piezoelectric elements adhered to its sides. Under two different applied voltages, the stator generates a driving force and transfers it to the rotor inserted in the through-hole. Performance assessments show that this micromotor generates an average angular velocity of 123 rad/s and a peak torque of 0.2 mu N.m. This torque value exceeds that of the existing micromotors.