Si waveguide-integrated superconducting nanowire single photon detectors with arrayed waveguide grating
Si waveguide-integrated superconducting nanowire single photon detectors with arrayed waveguide grating
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DOI：
10.1117/12.2595902
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发表时间：
2021-08
期刊：
影响因子：
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通讯作者：
Kyotaro Ono;T. Hiraki;T. Tsuchizawa;K. Yamada;S. Matsuo;D. Sakai;Hiroyuki Shibata
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文献类型：
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作者：
Kyotaro Ono;T. Hiraki;T. Tsuchizawa;K. Yamada;S. Matsuo;D. Sakai;Hiroyuki Shibata
在这里，我们研究了硅波导集成的超导纳米线单光子探测器(SNSPD)的性能，其中阵列波导光栅(AWG)由SiN/SiON组成。无论AWG处于室温还是低温，AWG的SNSPD的系统探测效率都没有变化，因为插入损耗没有变化，而在低温下通带移动了1.7 nm。另一方面，当AWG处于低温时，带有AWG的SNSPD的暗计数率降低了约20dB。低温AWG起到了冷光带通滤光片的作用，抑制了背景黑体辐射通过光纤产生的暗计数率。带有AWG的SNSPD的噪声等效功率(NEP)从室温AWG的4.8×10-17W/Hz-1/2提高到低温AWG的2.2×10-18W/Hz-1/2。结果表明，在低温下将光子电路与SNSPD集成，不仅有利于可扩展性，而且有助于提高性能。
Herein, we investigated the performance of a Si waveguide-integrated superconducting nanowire single-photon detector (SNSPD) with an arrayed waveguide grating (AWG) comprising SiN/SiON. The system detection efficiency of SNSPD with AWG was unchanged whether the AWG is at a room or cryogenic temperature because the insertion loss was unchanged while the passband shifts 1.7-nm lower at cryogenic temperature. On the other hand, the dark count rate of the SNSPD with AWG decreased by approximately 20 dB when the AWG was at cryogenic temperature. The AWG at the cryogenic temperature functioned as a cold optical bandpass filter, which suppressed the dark count rate due to the background room-temperature blackbody radiation through fiber optics. The noise equivalent power (NEP) of the SNSPD with AWG improved from 4.8 × 10-17 W/Hz-1/2 for the room-temperature AWG to 2.2 × 10-18 W/Hz-1/2 for the cryogenic-temperature AWG. Results demonstrated that the integration of photonic circuits with SNSPD at the cryogenic temperature benefited not only scalability but also performance.